Fingerprint Fingerprint is based on mining the text of the persons scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

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ions Physics & Astronomy
Plasmas Engineering & Materials Science
Callosities Chemical Compounds
electrons Physics & Astronomy
Ions Engineering & Materials Science
reactors Physics & Astronomy
energy Physics & Astronomy
pulses Physics & Astronomy

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Grants 2008 2018

Research Output 1978 2017

Atomic layer etching of 3D structures in silicon: Self-limiting and nonideal reactions

Huard, C. M., Zhang, Y., Sriraman, S., Paterson, A., Kanarik, K. J. & Kushner, M. J. May 1 2017 In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 3, 031306

Research output: Contribution to journalArticle

etching
Etching
cycles
plasma etching
Foreign Medical Graduates

Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources

Hamilton, J. R., Tennyson, J., Huang, S. & Kushner, M. J. May 9 2017 In : Plasma Sources Science and Technology. 26, 6, 065010

Research output: Contribution to journalArticle

cross sections
electron impact
nitrogen
ionization
difluorides
2 Citations
photons
ions
plasma etching
rare gases
etching

Effects of a chirped bias voltage on ion energy distributions in inductively coupled plasma reactors

Lanham, S. J. & Kushner, M. J. Aug 28 2017 In : Journal of Applied Physics. 122, 8, 083301

Research output: Contribution to journalArticle

energy distribution
ions
frequency ranges
wafers
impedance matching
1 Citations

Insights to scaling remote plasma sources sustained in NF3 mixtures

Huang, S., Volynets, V., Hamilton, J. R., Lee, S., Song, I. C., Lu, S., Tennyson, J. & Kushner, M. J. May 1 2017 In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 3, 031302

Research output: Contribution to journalArticle

Callosities
Plasmas
Plasma sources
Infant, Newborn, Diseases
Agglutination Tests