Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 2 Similar Profiles
Plasmas Engineering & Materials Science
ions Physics & Astronomy
reactors Physics & Astronomy
simulation Physics & Astronomy
electrons Physics & Astronomy
lasers Physics & Astronomy
energy distribution Physics & Astronomy
energy Physics & Astronomy

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Grants 2008 2018

Research Output 1978 2017

Atomic layer etching of 3D structures in silicon: Self-limiting and nonideal reactions

Huard, C. M., Zhang, Y., Sriraman, S., Paterson, A., Kanarik, K. J. & Kushner, M. J. May 1 2017 In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 3, 031306

Research output: Research - peer-reviewArticle

etching
silicon
Silicon
Etching
cycles

Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources

Hamilton, J. R., Tennyson, J., Huang, S. & Kushner, M. J. May 9 2017 In : Plasma Sources Science and Technology. 26, 6, 065010

Research output: Research - peer-reviewArticle

electron scattering
cross sections
electron impact
nitrogen
ionization
2 Citations
plasma etching
photons
ions
rare gases
etching

Effects of a chirped bias voltage on ion energy distributions in inductively coupled plasma reactors

Lanham, S. J. & Kushner, M. J. Aug 28 2017 In : Journal of Applied Physics. 122, 8, 083301

Research output: Research - peer-reviewArticle

energy distribution
reactors
electric potential
ions
frequency ranges
1 Citations

Insights to scaling remote plasma sources sustained in NF3 mixtures

Huang, S., Volynets, V., Hamilton, J. R., Lee, S., Song, I. C., Lu, S., Tennyson, J. & Kushner, M. J. May 1 2017 In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 3, 031302

Research output: Research - peer-reviewArticle

Plasma sources
Plasmas
scaling
Gas heating
Gases