Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 2 Similar Profiles
Plasmas Engineering & Materials Science
ions Physics & Astronomy
reactors Physics & Astronomy
simulation Physics & Astronomy
electrons Physics & Astronomy
lasers Physics & Astronomy
energy distribution Physics & Astronomy
energy Physics & Astronomy

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Grants 2008 2018

Research Output 1978 2018

Numerical study of the influence of surface reaction probabilities on reactive species in an rf atmospheric pressure plasma containing humidity

Schröter, S., Gibson, A. R., Kushner, M. J., Gans, T. & O'Connell, D. Jan 1 2018 In : Plasma Physics and Controlled Fusion. 60, 1, 014035

Research output: Research - peer-reviewArticle

fighter aircraft
plasma interactions
cold plasmas
surface reactions
humidity

Atomic layer etching of 3D structures in silicon: Self-limiting and nonideal reactions

Huard, C. M., Zhang, Y., Sriraman, S., Paterson, A., Kanarik, K. J. & Kushner, M. J. May 1 2017 In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 3, 031306

Research output: Research - peer-reviewArticle

etching
silicon
Silicon
Etching
cycles
1 Citations

Calculated cross sections for electron collisions with NF3, NF2 and NF with applications to remote plasma sources

Hamilton, J. R., Tennyson, J., Huang, S. & Kushner, M. J. May 9 2017 In : Plasma Sources Science and Technology. 26, 6, 065010

Research output: Research - peer-reviewArticle

electron scattering
cross sections
electron impact
nitrogen
ionization
2 Citations
plasma etching
photons
ions
rare gases
etching

Effects of a chirped bias voltage on ion energy distributions in inductively coupled plasma reactors

Lanham, S. J. & Kushner, M. J. Aug 28 2017 In : Journal of Applied Physics. 122, 8, 083301

Research output: Research - peer-reviewArticle

energy distribution
reactors
electric potential
ions
frequency ranges